Product features
Desktop machine, PLC computer automatic control, no
internal electrodes, Use for surface cleaning, etching,
activation process of low pollution and high purity materials.
Technical parameters
The equipment dimensions
630( W ) x 650( D ) x 420( H ) mm
The Chamber structure ( heat-resistant glass or quartz
glass, about 10 liters ) Φ215x 300( L ) mm
Effects of the electrode area ( external coupling capacitance or inductance coupling electrode )
180( W ) x 210( D ) mm
The plasma generator ( KM brand )
The frequency of 13.56MHZ, power 0-300Wcontinuous adjustment, automatic impedance matching
Control system
Touch screen (7 inch ) + PLC single step method, automatic control, Omron, Siemens and other world famous brands of electrical components, having both manual and automatic modes
Vacuum system
Leybold Vacuum Pump ( Leybold ) D16C (20m3/ h )
SMC valve, pneumatic valve, Germany ( Inficon ) pressure sensor
Pressure control
PID closed loop automatic voltage control
Gas system
Two ways of gas supply, the fly Toelke (FITOK) gas pipeline.
