Product Features
Large vertical machine, touch computer + PLC multi-step process automatic control, the detection circuit, used for LCD, PCB, LED, solar cells and other industry big batch cleaning, import configuration.
Technical Data
Outline size (not including the alarm lamp)
100 ( D ) x 85 ( W ) x 185 ( H ) cm
The silo structure ( stainless steel, approximately200 liters )
70 ( D ) x 55 ( W ) x53 ( H ) cm
Effects of the electrode area
53 ( W ) x 56 ( D ) cm,13 layer
The plasma generator (USA MKS )
The frequency of 13.56MHZ, power 0-1250W continuous adjustment, automatic impedance matching, circuit protection, can continuously work for a long time
Control system
PLC touch screen control, adopts Omron, Siemens and other world famous brands of electrical components, performance is stable and reliable, and has a manual, automatic two modes
The vacuum system ( PID vacuum pressure closed loop automatic control )
Japan Aifake ( ULVAC ) mechanical vacuum pump VDN601(17L / S ) ( former pump optional Edward stem pump )
Edward British roots pump EH250(70L / S )
Taiwan pneumatic vacuum angle valve, pneumatic valve, DN40stainless steel vacuum bellows, Germany INFICON high precision vacuum gauge, sensor
The inflation system
The USA AE high precision electronic mass flow meter ( two gas preparation ), needle valve
The USA Swagelok Rock gas pipeline and interface module, the German two-stage pressure reducing valve
Japan's SMC and CKD high vacuum valve are used.
